Low power 3 degree-of-freedom Lorentz force MEMS mirror for optical applications
| dc.contributor.author | Afsharipour, Elnaz | |
| dc.contributor.author | Soltanzadeh, Ramin | |
| dc.contributor.author | Park, Byoungyoul | |
| dc.contributor.author | Chrusch, Dwayne | |
| dc.contributor.author | Shafai, Cyrus | |
| dc.date.accessioned | 2019-06-14T15:56:55Z | |
| dc.date.available | 2019-06-14T15:56:55Z | |
| dc.date.issued | 2019 | |
| dc.date.submitted | 2019-06-14T15:14:42Z | en |
| dc.description.abstract | A low power three-degree-of-freedom scanning micro-mirror is presented. The 2×2 mm mirror is a gimbaless structure, directly supported by single crystal micro-springs. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third axis. The transient and frequency responses of the micro-mirror are analyzed. The Lagrange’s equations of motions, describing the dynamic behavior of the system are presented, and show a good agreement with the experimental results. The fabricated MEMS mirror demonstrated a tilt angle of 22.8o at 247.5 Hz about y-axis, and 13.3o at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20 mA current on the mirror. Power consumption was 2.6 mW of power in tilting motions in resonant operation. With a total dc drive current of 110 mA, 232 μm linear motion was achieved. | en_US |
| dc.identifier.doi | 10.1117/1.JMM.18.1.015001 | |
| dc.identifier.uri | http://hdl.handle.net/1993/33985 | |
| dc.language.iso | eng | en_US |
| dc.rights | open access | en_US |
| dc.subject | MEMS mirror, scanning micro-mirror, Lorentz actuator, electromagnetic actuator, 3- degree of freedom | en_US |
| dc.title | Low power 3 degree-of-freedom Lorentz force MEMS mirror for optical applications | en_US |
| dc.type | Article | en_US |