Low power 3 degree-of-freedom Lorentz force MEMS mirror for optical applications
Loading...
Date
2019
Authors
Afsharipour, Elnaz
Soltanzadeh, Ramin
Park, Byoungyoul
Chrusch, Dwayne
Shafai, Cyrus
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
A low power three-degree-of-freedom scanning micro-mirror is presented. The 2×2 mm mirror is a gimbaless structure, directly supported by single crystal micro-springs. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third axis. The transient and frequency responses of the micro-mirror are analyzed. The Lagrange’s equations of motions, describing the dynamic behavior of the system are presented, and show a good agreement with the experimental results. The fabricated MEMS mirror demonstrated a tilt angle of 22.8o at 247.5 Hz about y-axis, and 13.3o at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20 mA current on the mirror. Power consumption was 2.6 mW of power in tilting motions in resonant operation. With a total dc drive current of 110 mA, 232 μm linear motion was achieved.
Description
Keywords
MEMS mirror, scanning micro-mirror, Lorentz actuator, electromagnetic actuator, 3- degree of freedom