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dc.contributor.supervisorShafai, Cyrus (Electrical and computer engineering)en_US
dc.contributor.authorZhou, Yu
dc.date.accessioned2012-09-24T17:30:03Z
dc.date.available2012-09-24T17:30:03Z
dc.date.issued2012-09-24
dc.identifier.urihttp://hdl.handle.net/1993/8922
dc.description.abstractThis thesis includes the modification and optimization to an electric field mill based on micromachining technology. The sensor was originally designed to overcome the disadvantages of the conventional macroscopic field mill. Although it achieved all these listed above with a minimum detectable field strength at 42 V/m, some drawbacks are yet to be settled. In order to overcome these drawbacks, modifications are studied and put forward. Metal coating of the sensor surface could lead to a good electrical grounding that addresses the charging problem. Non-resonant working design was established with a shutter displacement around 5μm. Finite element simulations were set up to look into the optimizations of the structure parameters of the sensor, focusing on the shutter and electrodes. Moreover, the fabrication process was also studied with attempts of each step carried out in the NSFL of University of Manitoba.en_US
dc.language.isoengen_US
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectMEFMen_US
dc.subjectFEM simulationen_US
dc.titleInvestigation of a micromachined electric field mill to maximize the electrostatic field sensitivityen_US
dc.typeinfo:eu-repo/semantics/masterThesis
dc.typemaster thesisen_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.contributor.examiningcommitteeMartin, Jeffery W. (Physics and Astronomy) Kordi, Behzad (Electrical and Computer engineering)en_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.noteOctober 2012en_US


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