A Theory of Bubbles in Ion-implanted Structures

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1981-1-1
Authors
Kinsner, W.
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W. Kinsner, “A Theory of Bubbles in Ion-implanted Structures,” ElectroComponent Science and Technology, vol. 8, no. 3-4, pp. 247-247, 1981. doi:10.1155/APEC.8.247