A Theory of Bubbles in Ion-implanted Structures

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1981-1-1

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Kinsner, W.

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W. Kinsner, “A Theory of Bubbles in Ion-implanted Structures,” ElectroComponent Science and Technology, vol. 8, no. 3-4, pp. 247-247, 1981. doi:10.1155/APEC.8.247

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http://hdl.handle.net/1993/23799

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