Simulation and experimentation of a MEMS electrostatic field sensor with a floating ground
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Date
2024-07-01
Authors
Kaskiw, Joel
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Abstract
This thesis presents the simulation and experiments performed on a Micro-Electro-Mechanical System (MEMS) electrostatic field sensor with a virtual ground. Because of their small form factor and low power consumption, MEMS electrostatic field sensors offer a promising alternative to commonly used devices such as field mills.
Four separate simulations were conducted on the device, each with varying parameters to gain an understanding of how the device behaves when exposed to a 10kV DC voltage carrying wire. The simulation environment was designed to mimic the experimental conditions as close as possible. That being, simulation #1 tested the device moving towards the high voltage wire from the ground plane, the second simulation preformed had the device moving away from the wire while in contact with the ground plane. The third and fourth simulations added a wooden pole to act as a handle, this was done to mimic a possible real-world application. In these two simulations the device was tested at different heights from the ground plane and at different distances from the high voltage carrying wire. The results of these simulations were then compared to analytically obtained values, of which the simulated values agreed.
Five experiments were conducted in the University of Manitoba’s High Voltage Laboratory of which four were completed with the same environment as the simulations to ensure the results have as little discrepancy as possible. Experiment #1 was setup the same as simulation #1 and so on. The fifth experiment was conducted to see the behavior of the device in a potential real-world environment where a surface has become energized. A close correlation between the simulated, calculated, and experimental values were achieved.
In addition, control electronics and a Printed Circuit Board (PCB) were developed for the sensor that allowed it to be used in the experiments to collect data and have it perform as it would in real world setting. This system included a wireless data transmission system over a 2.4 GHz radio that allows the user to be physically separated from the device when taking readings, reducing the danger from high voltage sources, a display that allows the user to visually see the output from the device and finally, the ability for the output of the sensor to be recorded, this recorded data could then be used to help determine the behaviour of the sensor.
After all simulations and experiments we completed, it was determined that the sensor has a response that follows the predicted behavior by the four simulations and the analytical values.
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Keywords
MEMS, Electrostatic Fields