Plasma characterizations of an electron cyclotron resonance microwave plasma processing reactor

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dc.contributor.authorShufflebotham, Paul,en_US
dc.date.accessioned2013-03-05T17:34:46Z
dc.date.available2013-03-05T17:34:46Z
dc.date.issued1990en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelDoctor of Philosophy (Ph.D.)en_US
dc.description.abstracten_US
dc.format.extentvi, 130 leaves :en_US
dc.identifierocm72780578en_US
dc.identifier.urihttp://hdl.handle.net/1993/17298
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titlePlasma characterizations of an electron cyclotron resonance microwave plasma processing reactoren_US
dc.typedoctoral thesisen_US
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