Stressed micromachined magnetic actuators for micro-mirror applications

dc.contributor.authorJohnson, Jeremy T. M. G.en_US
dc.date.accessioned2013-05-07T21:13:32Z
dc.date.available2013-05-07T21:13:32Z
dc.date.issued2006en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstracten_US
dc.format.extent9476321 bytesen_US
dc.identifier(Sirsi) a1676323en_US
dc.identifier.urihttp://hdl.handle.net/1993/20359
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titleStressed micromachined magnetic actuators for micro-mirror applicationsen_US
dc.typemaster thesisen_US
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