Coupled electrostatic-mechanical analysis of probes used in Dynamic EFM
dc.contributor.author | Kaminski, Tom | en_US |
dc.date.accessioned | 2013-02-05T16:09:07Z | |
dc.date.available | 2013-02-05T16:09:07Z | |
dc.date.issued | 2004 | en_US |
dc.degree.discipline | Electrical and Computer Engineering | en_US |
dc.degree.level | Master of Science (M.Sc.) | en_US |
dc.description.abstract | en_US | |
dc.format.extent | x, 135 leaves : | en_US |
dc.identifier | ocm00059606 | en_US |
dc.identifier.uri | http://hdl.handle.net/1993/16309 | |
dc.language.iso | eng | en_US |
dc.rights | open access | en_US |
dc.title | Coupled electrostatic-mechanical analysis of probes used in Dynamic EFM | en_US |
dc.type | master thesis | en_US |
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