Stressed MEMS CPW cantilevers for high frequency scanning probe microscopy

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dc.contributor.authorLiang, Bingqingen_US
dc.date.accessioned2013-02-05T16:08:49Z
dc.date.available2013-02-05T16:08:49Z
dc.date.issued2004en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstracten_US
dc.format.extentx, 110 leaves :en_US
dc.identifier(Sirsi) AQI-9898en_US
dc.identifier.urihttp://hdl.handle.net/1993/16274
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titleStressed MEMS CPW cantilevers for high frequency scanning probe microscopyen_US
dc.typemaster thesisen_US
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