Study of surface damage induced by ion implantation

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dc.contributor.authorLiu, Ming.en_US
dc.date.accessioned2013-04-18T14:41:56Z
dc.date.available2013-04-18T14:41:56Z
dc.date.issued1995en_US
dc.degree.disciplinePhysicsen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstracten_US
dc.format.extent[ii], x, 86 leaves :en_US
dc.identifier(Sirsi) AID-8638en_US
dc.identifier.urihttp://hdl.handle.net/1993/18969
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titleStudy of surface damage induced by ion implantationen_US
dc.typemaster thesisen_US
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