MEMS micro-ribbons for integrated ground plane microstrip delay line phase shifter

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dc.contributor.authorYip, Joe
dc.contributor.examiningcommitteeBuchanan, Douglas (Electrical and Computer Engineering) Page, S.A. (Physics & Astronomy)en
dc.contributor.supervisorShafai, Cyrus (Electrical and Computer Engineering)en
dc.date.accessioned2008-01-18T15:05:26Z
dc.date.available2008-01-18T15:05:26Z
dc.date.issued2008-01-18T15:05:26Z
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstractA delay line phase shifter for the 30-70 GHz range is presented that uses an aluminum micro-ribbon array fabricated in the ground plane of a microstrip transmission line. Phase shift is achieved by changing the propagation velocity of an RF signal in the transmission line by controlling the effective permittivity of the substrate. This is done by actuating the micro-ribbons away from the substrate. This phase shifter has the benefits of analog phase shifts and high Figure of Merit. Simulations were done to model the micro-ribbon deflections, transmission line performance and phase shift. Arrays of 5, 10, and 20 μm wide micro-ribbons were fabricated and tested. At 40.80 GHz, the 20 μm wide micro-ribbons had a measured phase shift of 33º with an actuation voltage of 120 V. The corresponding Figure of Merit was a negative value indicating that there was no line loss due to ribbon deflection.en
dc.description.noteFebruary 2008en
dc.format.extent4251116 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1993/2997
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.subjectMEMSen
dc.subjectmicro-ribbonen
dc.subjectmicrostripen
dc.subjectphaseshifteren
dc.titleMEMS micro-ribbons for integrated ground plane microstrip delay line phase shifteren
dc.typemaster thesisen_US
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