Single crystal silicon Lorentz force actuated micromirror and MEMS blazed grating for optics and sensors

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dc.contributor.authorLi, Meiting
dc.contributor.examiningcommitteeSherif, Sherif (Electrical and Computer Engineering) Gwinner, Gerald (Physics)en_US
dc.contributor.supervisorShafai, Cyrus (Electrical and Computer Engineering)en_US
dc.date.accessioned2016-09-08T19:50:05Z
dc.date.available2016-09-08T19:50:05Z
dc.date.issued2016-01-18en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstractMicromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared wavelength range. Lorentz force actuated micromirrors were investigated, and two types of mirrors were fabricated: rotating and pop-up micromirrors. The deflection angle of the mirrors was controllable by altering the driving current on the mirror. Deflection angle vs. driving current was studied for different mirror types and different spring dimensions. A Lorentz force based magnetic field sensor is also demonstrated. The sensor employs the rotating micromirror as a resonator. With an AC current flowing around the micromirror, a periodic Lorentz force is generated which drives the resonator. The rotational amplitude of the micromirror is measured with an optical positioning system and external circuits. The highest resolution of the magnetic field sensor is 0.4 nT at 50 mArms, and 53 mHz filter bandwidth. With appropriate current level, this sensor can measure a wide range of magnetic field, from nT to T.en_US
dc.description.noteOctober 2016en_US
dc.identifier.citationPark, Byoungyoul, et al. "Lorentz force based resonant MEMS magnetic-field sensor with optical readout." Sensors and Actuators A: Physical 241 (2016): 12-18.en_US
dc.identifier.urihttp://hdl.handle.net/1993/31649
dc.language.isoengen_US
dc.publisherElsevieren_US
dc.rightsopen accessen_US
dc.subjectMEMSen_US
dc.subjectMicromirroren_US
dc.subjectLorentz forceen_US
dc.subjectActuatoren_US
dc.subjectMagnetic field sensoren_US
dc.subjectSilicon resonantoren_US
dc.subjectOptical sensingen_US
dc.titleSingle crystal silicon Lorentz force actuated micromirror and MEMS blazed grating for optics and sensorsen_US
dc.typemaster thesisen_US
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