A micromachined DC electric field sensor using a torsional micro mirror
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Date
2017
Authors
Hiniduma Liyanage, Janaranjana Sampath
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Abstract
This thesis presents a MEMS dc electric field sensor with wide measurement range and adjustable sensitivity. The novel concept is applying two opposite bias voltage on the sensor surface causing to tilt, enabling operation without reference ground. The sensor mirror is mounted by torsional springs and fabricated using buck micro machining technology. With compared to earlier works with vertical moving MEMS sensors, higher sensitivity is achieved for the same bias voltage. The sensor has an adjustable linear measurement range from 10's V/m to MV/m, with no saturation. Employing on-board electronics to enable independent resonant operation, a resolution of 3.2 V/m was achieved.
A portable semi automated measurement system was developed for outdoor electric field measurements. This overcomes the limit of electric field measurements for lab environments only. With the developed system, dc electric field tests were performed at University Manitoba High Voltage Laboratory, with and without corona presence to simulate an actual power line conditions. Promising results were obtained for future power industry related applications.
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Keywords
MEFM, electric field, electric field measurement, electric field mill, MEMS