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Electrostatic force microscopy and atomic force microscopy's applications to integrated circuit internal signal measurements

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dc.contributor.author Qi, Richard Xuesong en_US
dc.date.accessioned 2013-05-07T16:28:10Z
dc.date.available 2013-05-07T16:28:10Z
dc.date.issued 2003 en_US
dc.identifier (Sirsi) APW-6737 en_US
dc.identifier.uri http://hdl.handle.net/1993/19966
dc.description.abstract en_US
dc.format.extent xi, 88 leaves : en_US
dc.language en_US
dc.rights en_US
dc.title Electrostatic force microscopy and atomic force microscopy's applications to integrated circuit internal signal measurements en_US
dc.degree.discipline Electrical and Computer Engineering en_US


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