A Spiral Spring Electrostatic Actuator for Double Layer Deformable Mirror with Continuous Phase Sheet
| dc.contributor.author | Zhou, Yu | |
| dc.contributor.author | Shafai, Cyrus | |
| dc.contributor.author | Dietrich, James | |
| dc.date.accessioned | 2019-06-14T20:11:53Z | |
| dc.date.available | 2019-06-14T20:11:53Z | |
| dc.date.issued | 2019 | |
| dc.date.submitted | 2019-06-14T20:08:00Z | en |
| dc.description.abstract | A new electrostatic actuator for a double layer deformable mirror with continuous phase sheet is presented. The electrostatic actuator employs an upper electrode consisting of multiple Archimedean spiral spring arms supporting a small mass central attachment point, and is capable of separate the parameters of actuation voltage, spring constant, and resonance. The feature reduces the complexity in the designing of a double layer deformable mirror with continuous phase sheet that are widely employed in the adaptive optics area of astronomy. The fabricated device has a diameter of 1250 μm with 4 single crystal silicon spiral arms each having a length of 6030 μm, thickness of 15 μm, and width of 30 μm. The actuator was simulated and tested to have a resonant frequency above 2600 Hz, and was simulated to be capable of reaching approximately 5 μm displacement with a drive voltage of less than 30 V with an actuator-electrode separation of 15 μm, based on performance parameter found experimentally. | en_US |
| dc.identifier.doi | 10.1117/1.JMM.18.2.025501 | |
| dc.identifier.uri | http://hdl.handle.net/1993/33986 | |
| dc.language.iso | eng | en_US |
| dc.rights | open access | en_US |
| dc.subject | Electrostatic actuator, Spiral-shape spring, pico-second UV laser, Laser milling | en_US |
| dc.title | A Spiral Spring Electrostatic Actuator for Double Layer Deformable Mirror with Continuous Phase Sheet | en_US |
| dc.type | Article | en_US |