Electrostatic force microscopy and atomic force microscopy's applications to integrated circuit internal signal measurements

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dc.contributor.authorQi, Richard Xuesongen_US
dc.date.accessioned2013-05-07T16:28:10Z
dc.date.available2013-05-07T16:28:10Z
dc.date.issued2003en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstracten_US
dc.format.extentxi, 88 leaves :en_US
dc.identifier(Sirsi) APW-6737en_US
dc.identifier.urihttp://hdl.handle.net/1993/19966
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titleElectrostatic force microscopy and atomic force microscopy's applications to integrated circuit internal signal measurementsen_US
dc.typemaster thesisen_US
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