Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared ...

This thesis studies the application of a multi-objective niched Pareto genetic algorithm on the design optimization of an electric field mill sensor. The original sensor requires resonant operation. The objective of the ...

A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. First the deflection of the sensor’s membrane which is caused by electrostatic ...

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial ...

The image resolution of modern optical systems is restricted by wavefront aberrations due to turbulence and diffraction in optical media and instruments. Adaptive optics (AO) is a technology that improves image resolution ...

In this thesis, a micromachined electrostatic actuator is proposed for a deformable mirror system that is designed to achieve a decent stroke (~10 µm) with a reasonable resonant frequency (>1 kHz) and a controlling voltage ...