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    Single crystal silicon Lorentz force actuated micromirror and MEMS blazed grating for optics and sensors 

    Li, Meiting (Elsevier, 2016-01-18)
    Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared ...
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    Design optimization of a microelectromechanical electric field sensor using genetic algorithms 

    Roy, Mark (2012-09-24)
    This thesis studies the application of a multi-objective niched Pareto genetic algorithm on the design optimization of an electric field mill sensor. The original sensor requires resonant operation. The objective of the ...
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    Design, modeling and fabrication of a copper electroplated MEMS, membrane based electric field sensor 

    Tahmasebian, Ehsan (2015-01-09)
    A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. First the deflection of the sensor’s membrane which is caused by electrostatic ...
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    Capacitive Micromachined Ultrasonic Transducers: Design, Fabrication and Characterization 

    Jeba, Dilruba Zaman (2014-09-02)
    Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial ...
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    Development of a low voltage and large stroke MEMS-based lorentz force continuous deformable polymer mirror system 

    Park, Byoungyoul (2018-08-21)
    The image resolution of modern optical systems is restricted by wavefront aberrations due to turbulence and diffraction in optical media and instruments. Adaptive optics (AO) is a technology that improves image resolution ...
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    Low-voltage electrostatic actuators for deformable mirrors for adaptive optics 

    Zhou, Yu (2019-06-25)
    In this thesis, a micromachined electrostatic actuator is proposed for a deformable mirror system that is designed to achieve a decent stroke (~10 µm) with a reasonable resonant frequency (>1 kHz) and a controlling voltage ...

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    Authorjeba, dilruba zaman (1)li, meiting (1)park, byoungyoul (1)roy, mark (1)tahmasebian, ehsan (1)zhou, yu (1)Subject
    mems (6)
    adaptive optics (2)actuator (1)cmut (1)deformable mirror (1)deformable mirror (1)electric field measurement (1)... View MoreTheses/Practica Programs
    electrical and computer engineering (6)
    Date Issued2012 (1)2014 (1)2015 (1)2016 (1)2018 (1)2019 (1)

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