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MEMS micro-ribbons for integrated ground plane microstrip delay line phase shifter
(2008-01-18)
A delay line phase shifter for the 30-70 GHz range is presented that uses an aluminum micro-ribbon array fabricated in the ground plane of a microstrip transmission line. Phase shift is achieved by changing the propagation ...
Electrostatic testing of simple MEMS structures
(2006-07-12)
In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The actuation of the test resonant beam was ...