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    Design, modeling and fabrication of a copper electroplated MEMS, membrane based electric field sensor 

    Tahmasebian, Ehsan (2015-01-09)
    A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. First the deflection of the sensor’s membrane which is caused by electrostatic ...

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    Author
    tahmasebian, ehsan (1)
    Subjectelectric field sensor (1)electroplating (1)
    mems (1)
    micro-fabrication (1)... View MoreTheses/Practica Programs
    electrical and computer engineering (1)
    Date Issued2015 (1)

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