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Design, modeling and fabrication of a copper electroplated MEMS, membrane based electric field sensor

Tahmasebian, Ehsan

(2015-01-09)

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Author
- tahmasebian, ehsan (1)
Subject
- electric field sensor (1)
- electroplating (1)
- mems (1)
- micro-fabrication (1)
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Department (Theses)
- electrical and computer engineering (1)
Date Issued
- 2015 (1)

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