This thesis studies the application of a multi-objective niched Pareto genetic algorithm on the design optimization of an electric field mill sensor. The original sensor requires resonant operation. The objective of the ...

A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. First the deflection of the sensor’s membrane which is caused by electrostatic ...

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial ...

Micromirrors and diffraction gratings were developed for spectroscopy and magnetic field sensor in this thesis. MEMS blazed gratings were successfully fabricated in different grating periodicities to cover a wide infrared ...

The image resolution of modern optical systems is restricted by wavefront aberrations due to turbulence and diffraction in optical media and instruments. Adaptive optics (AO) is a technology that improves image resolution ...

In this thesis, a micromachined electrostatic actuator is proposed for a deformable mirror system that is designed to achieve a decent stroke (~10 µm) with a reasonable resonant frequency (>1 kHz) and a controlling voltage ...

In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The actuation of the test resonant beam was ...

A delay line phase shifter for the 30-70 GHz range is presented that uses an aluminum micro-ribbon array fabricated in the ground plane of a microstrip transmission line. Phase shift is achieved by changing the propagation ...

The design, development, and fabrication of a 67.5 kHz capacitive micromachined ultrasonic transducer (CMUT) suited for Martian anemometry is presented in this thesis. The CMUT is a clamped membrane structure that vibrates ...