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MEMS micro-ribbons for integrated ground plane microstrip delay line phase shifter
A delay line phase shifter for the 30-70 GHz range is presented that uses an aluminum micro-ribbon array fabricated in the ground plane of a microstrip transmission line. Phase shift is achieved by changing the propagation ...
Electrostatic testing of simple MEMS structures
In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The actuation of the test resonant beam was ...