Design & fabrication of corrugated micromachined membranes

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dc.contributor.authorChrusch, Dwayne D.en_US
dc.date.accessioned2013-05-01T16:56:36Z
dc.date.available2013-05-01T16:56:36Z
dc.date.issued2003en_US
dc.degree.disciplineElectrical and Computer Engineeringen_US
dc.degree.levelMaster of Science (M.Sc.)en_US
dc.description.abstracten_US
dc.format.extentxii, 88 leaves :en_US
dc.identifier(Sirsi) AQA-1724en_US
dc.identifier.urihttp://hdl.handle.net/1993/19862
dc.language.isoengen_US
dc.rightsopen accessen_US
dc.titleDesign & fabrication of corrugated micromachined membranesen_US
dc.typemaster thesisen_US
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