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dc.contributor.author Bugyik, Paul L. en_US
dc.date.accessioned 2007-07-12T19:42:06Z
dc.date.available 2007-07-12T19:42:06Z
dc.date.issued 2001-06-01T00:00:00Z en_US
dc.identifier.uri http://hdl.handle.net/1993/2683
dc.description.abstract Micromachining is currently being studied to help reduce the packaging and integration costs of multi-chip modules (MCMs) in radio frequency (RF) systems. Such systems require the integration of radiating elements, feed networks, micro-electromechanical systems (MEMS), and monolithic microwave integrated circuits (MMICs). Each subsystem has its own requirements in terms of material properties. Antennas radiate best when located on low dielectric constant materials, while higher dielectric constant materials permit smaller size for feed networks. In both cases low loss is a practical concern. Ideally one material could be used which would satisfy all the requirements. In this work a sequence of processes to create thick copper coplanar waveguide (CPW) structures on low-cost aluminosilicate glass substrates is proposed and demonstrated. Conductor loss as a function of geometry and conductor thickness will be discussed. Results will be presented that indicate the effective dielectric constant of a single substrate material can be varied by micromachining an air/dielectric lattice structure beneath perforated conductors. This micromachined perforated CPW (MCPW) structure can effectively provide multiple dielectrics with a single material. The micromachined structures are characterized against a regular finite ground CPW and compared against numerical predictions. en_US
dc.format.extent 3434105 bytes
dc.format.extent 184 bytes
dc.format.mimetype application/pdf
dc.format.mimetype text/plain
dc.language en en_US
dc.language.iso en_US
dc.rights info:eu-repo/semantics/openAccess
dc.title Coplanar waveguide structures on micromachined glass substrates en_US
dc.type info:eu-repo/semantics/masterThesis
dc.type master thesis en_US
dc.degree.discipline Electrical and Computer Engineering en_US
dc.degree.level Master of Science (M.Sc.) en_US


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