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dc.contributor.author Shufflebotham, Paul, en_US
dc.date.accessioned 2013-03-05T17:34:46Z
dc.date.available 2013-03-05T17:34:46Z
dc.date.issued 1990 en_US
dc.identifier ocm72780578 en_US
dc.identifier.uri http://hdl.handle.net/1993/17298
dc.description.abstract en_US
dc.format.extent vi, 130 leaves : en_US
dc.language en en_US
dc.rights en_US
dc.title Plasma characterizations of an electron cyclotron resonance microwave plasma processing reactor en_US
dc.degree.discipline Electrical and Computer Engineering en_US


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