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Capacitive Micromachined Ultrasonic Transducers: Design, Fabrication and Characterization
(2014-09-02)
Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial ...
MEMS ultrasonic sensors for anemometry applications on MARS
(2022-10-28)
The design, development, and fabrication of a 67.5 kHz capacitive micromachined ultrasonic transducer (CMUT) suited for Martian anemometry is presented in this thesis. The CMUT is a clamped membrane structure that vibrates ...