The image resolution of modern optical systems is restricted by wavefront aberrations due to turbulence and diffraction in optical media and instruments. Adaptive optics (AO) is a technology that improves image resolution ...

In this thesis, a micromachined electrostatic actuator is proposed for a deformable mirror system that is designed to achieve a decent stroke (~10 µm) with a reasonable resonant frequency (>1 kHz) and a controlling voltage ...