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    Electrostatic testing of simple MEMS structures 

    Cheng, Kar Mun (2006-07-12)
    In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The actuation of the test resonant beam was ...
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    MEMS micro-ribbons for integrated ground plane microstrip delay line phase shifter 

    Yip, Joe (2008-01-18)
    A delay line phase shifter for the 30-70 GHz range is presented that uses an aluminum micro-ribbon array fabricated in the ground plane of a microstrip transmission line. Phase shift is achieved by changing the propagation ...

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    Authorcheng, kar mun (1)yip, joe (1)Subject
    mems (2)
    electrostatic (1)micro-ribbon (1)microstrip (1)non-contact (1)phaseshifter (1)resonators (1)... View MoreTheses/Practica Programs
    electrical and computer engineering (2)
    Date Issued2006 (1)2008 (1)

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