A Spiral Spring Electrostatic Actuator for Double Layer Deformable Mirror with Continuous Phase Sheet

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Date
2019
Authors
Zhou, Yu
Shafai, Cyrus
Dietrich, James
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Abstract
A new electrostatic actuator for a double layer deformable mirror with continuous phase sheet is presented. The electrostatic actuator employs an upper electrode consisting of multiple Archimedean spiral spring arms supporting a small mass central attachment point, and is capable of separate the parameters of actuation voltage, spring constant, and resonance. The feature reduces the complexity in the designing of a double layer deformable mirror with continuous phase sheet that are widely employed in the adaptive optics area of astronomy. The fabricated device has a diameter of 1250 μm with 4 single crystal silicon spiral arms each having a length of 6030 μm, thickness of 15 μm, and width of 30 μm. The actuator was simulated and tested to have a resonant frequency above 2600 Hz, and was simulated to be capable of reaching approximately 5 μm displacement with a drive voltage of less than 30 V with an actuator-electrode separation of 15 μm, based on performance parameter found experimentally.
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Keywords
Electrostatic actuator, Spiral-shape spring, pico-second UV laser, Laser milling
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