Price Faculty of Engineering
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Browsing Price Faculty of Engineering by Author "Afsharipour, Elnaz"
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- ItemOpen AccessLow power 3 degree-of-freedom Lorentz force MEMS mirror for optical applications(2019) Afsharipour, Elnaz; Soltanzadeh, Ramin; Park, Byoungyoul; Chrusch, Dwayne; Shafai, CyrusA low power three-degree-of-freedom scanning micro-mirror is presented. The 2×2 mm mirror is a gimbaless structure, directly supported by single crystal micro-springs. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third axis. The transient and frequency responses of the micro-mirror are analyzed. The Lagrange’s equations of motions, describing the dynamic behavior of the system are presented, and show a good agreement with the experimental results. The fabricated MEMS mirror demonstrated a tilt angle of 22.8o at 247.5 Hz about y-axis, and 13.3o at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20 mA current on the mirror. Power consumption was 2.6 mW of power in tilting motions in resonant operation. With a total dc drive current of 110 mA, 232 μm linear motion was achieved.