A Tunable MEMS-Enabled Frequency Selective Surface

Abstract

A frequency selective surface (FSS) based on switchable slots in the ground plane is presented. The switching is done using an actuating MEMS bridge over the slot. The intent is to demonstrate the control of the resonance frequency of the FSS by deflecting the bridge. It is shown that by applying a voltage between the bridge and the ground plane, the bridge displaces and changes the system capacitance which in turn changes the resonance frequency. Two analyses are presented; (1) Electromechanical analysis to show how the bridge deflects by the voltage, (2) Electromagnetic analysis to show how the resonance frequency changes by the bridge deflection. The device was fabricated and tested. The measurement results are presented for two up and down positions of the MEMS bridge to verify the correctness of the theory and design.